microlithography

What Are The Three 3 Basic Steps Of The Photolithography Process? Photolithography uses three basic process steps to transfer a pattern from a mask to a wafer: coat, develop, expose. The pattern is transferred into the wafer’s surface layer during a subsequent process. In some cases, the resist pattern can also be used to define

What Are The Photolithography Requirements? In general, a photolithography process requires three basic materials, light source, photo mask, and photoresist. Photoresist, a photosensitive material, has two types, positive and negative. The positive photoresist become more soluble after exposure to a light source. What are the main parameters that determine the resolution of photolithography? The performance